\*Parmlist \Contact delta voltage: 0.35 \Vacuum Leak voltage: 3 \Vacuum Sense voltage: 3.5 \Approach speed [%]: 30 \Approach step [um]: 1.0 \Withdraw speed [%]: 5 \Eject duration [s]: 3 \Extra clearance [um]: 2000 \Contact sense bit: 1 \Vac supply bit: 1 \Initial SPM: 0 \Initial optics: 0 \Last slot: -1 \Last X: 150634 \Last Y: -158137 \Last Z: 0 \Tip optics: 0 \X reference: 150688 \Y reference: -142858 \X index: 0 \Y index: 1 \X max: 3 \X delta: -6075 \Frequency [KHz]: 0.9 \Min frequency [KHz]: 200 \Max frequency [KHz]: 480 \Amplitude [V]: 3 \Max amplitude [V]: 7 \H deflection max [V]: 2 \V deflection max [V]: 2 \Minimum sum [V]: 0.75 \Safety height [um]: 100 \Approach overshoot [um]: 100 \Empty slot clearance [um]: 200 \Slot depth [um]: 430 \Close enough [um]: 20 \Min contact sense: 1 \Contact sense floor: 0.01 \Empty slot X: 150076 \Empty slot Y: -142880 \PR offset [um]: 0 \PR file 1: pr1.sit \PR file 2: pr2.sit \PR file 3: pr3.sit \PR file 4: mtslot.sit \PR file 5: loctip.sit \PR1 X Low: -300 \PR1 Y Low: -300 \PR1 Z Low: -10 \PR1 X High: 300 \PR1 Y High: 300 \PR1 Z High: 10 \PR2 X Low: -150 \PR2 Y Low: -150 \PR2 Z Low: -10 \PR2 X High: 150 \PR2 Y High: 150 \PR2 Z High: 10 \PR3 X Low: -100 \PR3 Y Low: -100 \PR3 Z Low: -10 \PR3 X High: 100 \PR3 Y High: 100 \PR3 Z High: 10 \PR5 X Max: 35 \PR5 Y Max: 25 \PR5 Z Max: 50 \Cover X: 140179 \Cover Y: -146533 \Cover Z: 0 \Cover illumination: 40 \Cover intensity: 100 \Check illumination: 100 \Check intensity: 50 \Empty slot illumination: 100 \Empty slot intensity: 70 \No tip illumination: 90 \No tip delta intensity: 80 \Critical count: 3 \Same error retries: 5 \UPS port: 5 \Have tip: 0 \Log file name: tipx.tpx