\*Stage list \X axis: 0 \X axis sign: 1 \X maximum count: 8000000 \X minimum count: -8000000 \X acceleration: 8000 \X start speed: 1000 \X speed: 5600 \X initial status: 1 \X units/count: 1.5875 \X format: %.1hf \X manual speed: 5000 \X manual acceleration: 8000 \X max error: 5 \Y axis: 1 \Y axis sign: 1 \Y maximum count: 8000000 \Y minimum count: -8000000 \Y acceleration: 8000 \Y start speed: 1000 \Y speed: 5600 \Y initial status: 1 \Y units/count: 1.5875 \Y format: %.1hf \Y manual speed: 5000 \Y manual acceleration: 8000 \Y max error: 5 \Optics axis: 2 \Optics axis sign: 1 \Optics maximum count: 8000000 \Optics minimum count: -8000000 \Optics acceleration: 1200 \Optics start speed: 800 \Optics speed: 1200 \Optical initial status: 3 \Optics units/count: 0.24498 \Optics format: %.1hf \Optics manual speed: 1200 \Optics manual acceleration: 1200 \Optics max error: 5 \SPM axis: 3 \SPM axis sign: 1 \SPM maximum count: 8000000 \SPM minimum count: -8000000 \SPM acceleration: 8000 \SPM start speed: 1000 \SPM speed: 5000 \SPM initial status: 5 \SPM units/count: 0.138889 \SPM format: %.1hf \SPM manual speed: 5000 \SPM manual acceleration: 8000 \SPM max error: 5 \Aux axis: -1 \Aux axis sign: 1 \Aux maximum count: 0 \Aux minimum count: 0 \Aux acceleration: 0 \Aux deceleration: 256000 \Aux speed: 0 \Aux initial status: 0 \Aux units/count: 1e-006 \Aux load count: 0 \Aux manual speed: 25000 \Aux manual acceleration: 1 \Aux settle time: 0 \Aux manual deceleration: 256000 \Aux derivative: 64 \Aux integrator: 0 \Aux proportional: 6 \Aux off on error: 0 \Aux idle state: 0 \Aux motor type: 1 \Aux encoder config: 0 \Aux dual loop: 0 \Aux integrator limit: 9.9988 \Aux torque limit: 9.998 \Aux max error: 5 \Aux offset: -100000 \Aux timer: 250 \Aux sensor inputs: 6 \Aux magnetic cycle: 5000 \Aux zero phase: 90 \Aux encoder factor: 1 \Tilt axis: -1 \Tilt axis sign: 1 \Tilt maximum count: 0 \Tilt minimum count: 0 \Tilt acceleration: 0 \Tilt deceleration: 256000 \Tilt speed: 0 \Tilt initial status: 0 \Tilt units/count: 1e-009 \Tilt settle time: 0 \Tilt derivative: 64 \Tilt integrator: 0 \Tilt proportional: 6 \Tilt off on error: 0 \Tilt idle state: 0 \Tilt motor type: 1 \Tilt encoder config: 0 \Tilt dual loop: 0 \Tilt integrator limit: 9.9988 \Tilt torque limit: 9.998 \Tilt max error: 5 \Tilt offset: 0 \Tilt encoder factor: 1 \Deskew axis: -1 \Deskew axis sign: 1 \Deskew maximum count: 0 \Deskew minimum count: 0 \Deskew acceleration: 0 \Deskew deceleration: 256000 \Deskew speed: 0 \Deskew initial status: 0 \Deskew units/count: 0 \Deskew settle time: 0 \Deskew derivative: 64 \Deskew integrator: 0 \Deskew proportional: 6 \Deskew off on error: 0 \Deskew idle state: 0 \Deskew motor type: 1 \Deskew encoder config: 0 \Deskew dual loop: 0 \Deskew integrator limit: 9.9988 \Deskew torque limit: 9.998 \Deskew max error: 5 \Deskew offset: 0 \Deskew encoder factor: 1 \Move retries: 2 \Controller address: 210 \Controller 2 address: 0 \Limit sign: 1 \Aux limit sign: 1 \Limit reset value: 3 \XY initial cal speed: 50 \XY final cal speed: 20 \Cal limit time: 500 \SPM step size: 0.277778 \Manual speed 1: 0.5 \Manual break 2: 60 \Manual speed 2: 3.5 \Manual break 3: 80 \Manual speed 3: 10 \Manual break 4: 95 \Aux port: 1 \Mouse port: 0 \Max mouse count: 120 \Mirror location count: -9916 \Optics initial locate count: -1000 \Tip height: 31 \Tip Z initial locate count: -84907 \Tip Z safety [um]: 100 \SPM engage step [um]: 0.972223 \AFM overshoot [um]: 100 \STM overshoot [um]: 100 \SPM withdraw [um]: 898.751 \SPM sample clearance [um]: 998.784 \Load/Unload min [um]: 100 \Load/Unload height [um]: 2000 \Tip X count: 0 \Tip Y count: 0 \Tip X adjustment: 0 \Tip Y adjustment: 0 \User Home X count: 98921 \User Home Y count: -314196 \User Axis X count: 0 \User Axis Y count: 0 \User Home Z count: 0 \Last X count: 97798 \Last Y count: -314257 \Last optics count: -3112 \Last SPM count: -84907 \Last focus count: -3112 \Last engage count: -91378 \Last relative X count: 0 \Last relative Y count: 0 \Last relative dx: 0 \Last relative dy: 0 \Program step: 0 \Program name: test6 \Program reference: 1 \Minimum sum: 500 \Focus On: Surface \Allow short withdraw: Yes