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Gaertner L166C Ellipsometer

Serial # 1609-AK, Aug 1994
Gaertner variable angle Stokes L166C Ellipsometer: Single layer films such as oxides, nitrides and photoresists can be measured to angstrom precision. Two, three and four layer films, with know bottom layers such as poly on oxide and oxide on poly on oxide can be measured for the thickness and refractive index of the top layer or for both thicknesses. Windows LGEMP modeling software permits multi-parameter measurements utilizing the manually selectable angles of incidence.Laser. He-Ne Red Laser (< 1 mW); variable angles; beam diameter ~1 mm; sample size up to 150 mm dia. and 10 mm max thickness; measurement range: 0 to 6,000 0.3 nm.

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  • Tutorial for Ellipsometer Program
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  • Wikipedia Article
  • Woollam Tutorial on Ellipsometer
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