Ellipsometer data table


Table of Contents - Glossary - Study Aids - Ellipsometer description
The table below lists the refractive index n* = n - i k for different materials as well as the minimum or maximum angle of the analyzer and the half wavelength thickness when using a He/Ne laser (l = 632.8 nm) and an incident angle of 70 degrees.
Material Real part of the refractive index,
n
Imaginary part of the refractive index, k Minumum or maximum value of A1 (Degrees) Repetition thickness,
drep (nm)
Aluminum 1.39 1.51 27.05 308.9
Aluminum Oxide 1.79 15.04 212.6
Aluminum Nitride 2.11 8.81 167.5
Amorphous silicon 4.23 0.461 13.50 76.7
Cadmium Sulfide 2.416 0.17 4.75 142.2
Cadmium Telluride 0.625 2.87 39.50
Carbon (non cubic) 2.7 0.584 6.88 125.0
Chrome ? 3.465 1.163 13.27 94.9
Copper 2.43 3.46 30.25 141.2
Diamond 2.41 (@656.3nm) 4.32 142.6
GaAs Native Oxide 1.8 14.26 206.1
Gallium Antimonide 5.145 1.1 19.40 62.5
Gallium Arsenide 3.856 0.196 10.53 84.6
Gallium Nitride 1.97 11.15 182.7
Gallium Phosphide 3.31 5.87 99.7
Germanium 5.441 0.785 19.91 59.0
Glass 1.5 20.64 270.6
Gold 0.166 3.15 43.65
Hafnium Oxide 1.9 12.40 191.6
Indium Antimonide 4.313 1.823 19.38 75.2
Indium Arsenide 3.956 0.603 12.30 82.3
Indium Nitride 2.9 1.74 115.3
Indium Phosphide 3.533 0.305 8.38 92.9
Indium Tin Oxide 1.8 14.26 206.1
Iridium 2.53 4.6 34.13 134.7
Lead Sulfide 0.62 4.29
Lead Floride 1.391 23.33 308.5
Lithium Niobate 2.283 2.2 23.79 152.1
Molybdenum 3.7 3.56 27.65 88.4
Mylar 1.65 17.29 233.3
Negative Resist 1.52 20.17 264.8
Nickel 1.08 3.74 38.05 594.4
Osmium 3.89 1.67 17.63 83.8
Platinum 2.33 4.16 33.36 148.4
Polyimide 1.6 18.36 244.3
Polysilicon 4 0 to 0.5 11.41 81.4
Pos Resist 1.64 17.5 235.4
Pos Resist (E Beam) 1.54 19.71 259.3
Potassium Chloride 1.488 20.92 274.2
Rhodium 2.18 5.65 37.68 160.8
Sapphire 1.766 14.92 211.6
Silicon 3.875 0.018 10.88 84.2
Silicon Carbide 2.73 0.02 0.21 123.4
Silicon Dioxide 1.455 0 21.72 284.8
Silicon Dioxide 1.459 0 21.62 283.5
Silicon monoxide 1.969 0.01175 11.17 182.9
Silicon Nitride 2.02 10.29 176.9
Silver 1.35 4 37.17 326.4
Sodium Chloride 1.543 19.64 258.5
Tantalum Pentoxide 2.1 8.97 168.5
Titanium 2.16 2.93 28.86 162.7
Titanium Dioxide 2.88 1.52 116.2
Tungsten 3.65 2.92 24.66 89.7
Zinc Sulfide 2.354 5.11 146.6

© Bart Van Zeghbroeck, 1997