Other Instrument Facilities at Caltech



Geology & Planetary Sciences Facilities

Dr. George Rossman's Lab

FTIR Spectroscopy: Nicolet Magna 860 with microscope

Optical Micro-Spectroscopy Instrument

Raman Spectroscopy

Dr. George Rossman Lab

GPS Division Analytical Facility

Electron Probe Micro-analyzer GPS Field Emission Scanning Electron Microscopes

X-ray Powder Diffractometer

X-ray Fluorescence Spectrometer

GPS Division Analytical Facility

Caltech Center for Microanalysis

SIMS, micro-SIMS, and optical Profiler


Inductively Couple Plasma-Mass Spectrometer (ICP-MS)

Mass Spectrometers

GPS Instruments

Geochemical Instrumentation

Environmental Sciences Facilities

Mass Spectrometry

Inductively Couple Plasm-MS

Gas Chromatography-MS

Liquid Chromatography-Ms

Ion Chromatography-MS

Environmental Analysis Center

Applied Physics Facilities

TEM Microscope Facilities

TEM Microscopes

Materials Science Instruments

Transmission and Analytical Electron Microscopy

X-Ray Powder Diffractometer

Inelastic Neutron Scattering

Mossbauer Spectrometry


Thermogravimetric Analysis

Simultaneous Calorimetric and Gravimetric Analysis

Thermal Expansion

Elastic Moduli

Materials Science Instruments

Applied Physics Micro/Nano Facility

Mask Aligner (Karl Suss MA6/BA6 & MJB3)

Optical Microscope (Nikon Optiphot-300)

Stylus Profilometer

Single Wavelength Microspot Ellipsometer (Rudolph Focus FE III)

Atomic Force Microscope (thermomicroscopes AutoProbe CP)

Field Emission Scanning Electron Microscope (Hitachi S-4100)

E-Beam Lithography using FESEM (Hitachi S-4100)

Inverted Optical Microscope ( Nikon TE 200)

Veeco Metallization Chamber

Oxygen Plasma System

CV and IV Measurement Station

Micro/Nano Facility

Molecular Beam Epitaxy systems for Group IV (Si, Ge) and Oxides

HV Sputtering System (SRO:Er) 

HV Hot Wire CVD Cluster Tool

Silicon Tetrachloride CVD Reactor

Metal Evaporator

UV Ozone Cleaning System

Plasma Asher

Molecular Bean Epitaxy Sulfide, Phosphide, Gallium Nitride 

Ambient Atomic Force / Electrostatic Force Microscopy (Park Scientific)

UHV Variable Temperature Atomic Force / Electrostatic Force Microscopy (Omicron Instruments)

Near Field Scanning Optical Microscopy (Nanonics)

Spectroscopic Ellipsometry

Dr. Harry Atwater Laboratory

Chemistry& Chemical Engineering Facilities

NMR of liquid Samples

Caltech Liquid NMR Facility

NMR of Solid Samples

Caltech Solid State NMR Facility

X-Ray Crystallography Facility

BI X-Ray Crystallography Facility

Mass Spec Facility

Mass Spec Facility

Kavli Nanoscience Institute of Caltech

Scanning Electron Microscopes (FEI Quanta & FEI Sirion)

Ion-Beam/Electron-Beam Systems (FEI Nova-600 & Nova-200)

Scanning Transmission Electron Microscope (FEI Tecnai F-20 & F-30)

Electron-Beam Lithography (Leica EBPG-=5000)

Inductively Coupled Plasma Etching Systems (ICP-RIE) (Oxford Bosh/Cryo & Oxford III-V Metal Etcher)

Plasma-Enhanced Chemical Vapor Deposition Systems (Oxford Dielectric PECVD-ICP & Oxford PECVD) 

Kavli Nanoscience Institute

Beckman Institute of Caltech

BI Laser Resource Center

BILRC Home page

BI Molecular Materials Research Center

BiMMRC Home page